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Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon–nitrogen films
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10.1063/1.116268
/content/aip/journal/apl/68/19/10.1063/1.116268
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/19/10.1063/1.116268
/content/aip/journal/apl/68/19/10.1063/1.116268
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/content/aip/journal/apl/68/19/10.1063/1.116268
1996-05-06
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon–nitrogen films
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/19/10.1063/1.116268
10.1063/1.116268
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