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Dopant delineation on Si(100) using anodic oxidation and atomic force microscopy
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10.1063/1.116342
/content/aip/journal/apl/68/20/10.1063/1.116342
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/20/10.1063/1.116342
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/content/aip/journal/apl/68/20/10.1063/1.116342
1996-05-13
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dopant delineation on Si(100) using anodic oxidation and atomic force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/20/10.1063/1.116342
10.1063/1.116342
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