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Outdiffusion of impurity atoms from silicon crystals and its dependence upon the annealing atmosphere
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10.1063/1.115935
/content/aip/journal/apl/68/9/10.1063/1.115935
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/9/10.1063/1.115935
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/content/aip/journal/apl/68/9/10.1063/1.115935
1996-02-26
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Outdiffusion of impurity atoms from silicon crystals and its dependence upon the annealing atmosphere
http://aip.metastore.ingenta.com/content/aip/journal/apl/68/9/10.1063/1.115935
10.1063/1.115935
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