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High‐speed and high‐sensitivity silicon‐on‐insulator metal‐semiconductor‐metal photodetector with trench structure
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10.1063/1.118102
/content/aip/journal/apl/69/1/10.1063/1.118102
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/1/10.1063/1.118102
/content/aip/journal/apl/69/1/10.1063/1.118102
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/content/aip/journal/apl/69/1/10.1063/1.118102
1996-07-01
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High‐speed and high‐sensitivity silicon‐on‐insulator metal‐semiconductor‐metal photodetector with trench structure
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/1/10.1063/1.118102
10.1063/1.118102
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