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Diamond‐like carbon films grown by very high frequency (100 MHz) plasma enhanced chemical vapor deposition technique
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10.1063/1.118114
/content/aip/journal/apl/69/1/10.1063/1.118114
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/1/10.1063/1.118114
/content/aip/journal/apl/69/1/10.1063/1.118114
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/content/aip/journal/apl/69/1/10.1063/1.118114
1996-07-01
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diamond‐like carbon films grown by very high frequency (100 MHz) plasma enhanced chemical vapor deposition technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/1/10.1063/1.118114
10.1063/1.118114
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