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Production of intense atomic nitrogen beam used for doping and synthesis of nitride film
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10.1063/1.117437
/content/aip/journal/apl/69/10/10.1063/1.117437
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/10/10.1063/1.117437
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/content/aip/journal/apl/69/10/10.1063/1.117437
1996-09-02
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Production of intense atomic nitrogen beam used for doping and synthesis of nitride film
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/10/10.1063/1.117437
10.1063/1.117437
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