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Effect of BF2 implantation on ultrathin gate oxide reliability
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10.1063/1.117040
/content/aip/journal/apl/69/11/10.1063/1.117040
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/11/10.1063/1.117040
/content/aip/journal/apl/69/11/10.1063/1.117040
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/content/aip/journal/apl/69/11/10.1063/1.117040
1996-09-09
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of BF2 implantation on ultrathin gate oxide reliability
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/11/10.1063/1.117040
10.1063/1.117040
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