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Rapid solid phase crystallization of nanocrystalline silicon deposited by electron cyclotron plasma chemical vapor deposition
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10.1063/1.117462
/content/aip/journal/apl/69/13/10.1063/1.117462
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/13/10.1063/1.117462
/content/aip/journal/apl/69/13/10.1063/1.117462
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/content/aip/journal/apl/69/13/10.1063/1.117462
1996-09-23
2014-11-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rapid solid phase crystallization of nanocrystalline silicon deposited by electron cyclotron plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/13/10.1063/1.117462
10.1063/1.117462
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