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Diagnostics of a non‐equilibrium inductively coupled plasmas in argon
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10.1063/1.117545
/content/aip/journal/apl/69/18/10.1063/1.117545
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/18/10.1063/1.117545
/content/aip/journal/apl/69/18/10.1063/1.117545
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/content/aip/journal/apl/69/18/10.1063/1.117545
1996-10-28
2014-12-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diagnostics of a non‐equilibrium inductively coupled plasmas in argon
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/18/10.1063/1.117545
10.1063/1.117545
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