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Stress reduction and interface quality of buried Sb δ doping layers on Si(001)
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10.1063/1.117319
/content/aip/journal/apl/69/19/10.1063/1.117319
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/19/10.1063/1.117319
/content/aip/journal/apl/69/19/10.1063/1.117319
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/content/aip/journal/apl/69/19/10.1063/1.117319
1996-11-04
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress reduction and interface quality of buried Sb δ doping layers on Si(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/19/10.1063/1.117319
10.1063/1.117319
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