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Angle etch control for silicon carbide power devices
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10.1063/1.117935
/content/aip/journal/apl/69/2/10.1063/1.117935
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/2/10.1063/1.117935
/content/aip/journal/apl/69/2/10.1063/1.117935
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/content/aip/journal/apl/69/2/10.1063/1.117935
1996-07-08
2014-08-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Angle etch control for silicon carbide power devices
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/2/10.1063/1.117935
10.1063/1.117935
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