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Gas‐phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W on TiN/Ti/SiO2 structures for integrated circuit fabrication
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10.1063/1.117953
/content/aip/journal/apl/69/21/10.1063/1.117953
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/21/10.1063/1.117953
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/content/aip/journal/apl/69/21/10.1063/1.117953
1996-11-18
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Gas‐phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W on TiN/Ti/SiO2 structures for integrated circuit fabrication
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/21/10.1063/1.117953
10.1063/1.117953
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