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Structural and mechanical properties of (B0.5−x Si x )N0.5 films synthesized by dual‐ion‐beam deposition
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10.1063/1.117225
/content/aip/journal/apl/69/23/10.1063/1.117225
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/23/10.1063/1.117225
/content/aip/journal/apl/69/23/10.1063/1.117225
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/content/aip/journal/apl/69/23/10.1063/1.117225
2010-02-22
2014-09-15
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and mechanical properties of (B0.5−xSix)N0.5 films synthesized by dual‐ion‐beam deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/23/10.1063/1.117225
10.1063/1.117225
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