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Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
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10.1063/1.117188
/content/aip/journal/apl/69/24/10.1063/1.117188
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/24/10.1063/1.117188
/content/aip/journal/apl/69/24/10.1063/1.117188
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/content/aip/journal/apl/69/24/10.1063/1.117188
1996-12-09
2014-09-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/24/10.1063/1.117188
10.1063/1.117188
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