Full text loading...
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Pressure and power dependence of self‐bias, sheath thickness, and deposition rate in confined methane plasmas at 13.56 MHz
Data & Media loading...
Article metrics loading...