1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Nitrogen incorporation in thin oxides by constant current N2O plasma anodization of silicon and N2 plasma nitridation of silicon oxides
Rent:
Rent this article for
USD
10.1063/1.116928
/content/aip/journal/apl/69/8/10.1063/1.116928
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/8/10.1063/1.116928
/content/aip/journal/apl/69/8/10.1063/1.116928
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/69/8/10.1063/1.116928
1996-08-19
2014-08-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen incorporation in thin oxides by constant current N2O plasma anodization of silicon and N2 plasma nitridation of silicon oxides
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/8/10.1063/1.116928
10.1063/1.116928
SEARCH_EXPAND_ITEM