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Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films
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10.1063/1.117397
/content/aip/journal/apl/69/9/10.1063/1.117397
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/9/10.1063/1.117397
/content/aip/journal/apl/69/9/10.1063/1.117397
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/content/aip/journal/apl/69/9/10.1063/1.117397
1996-08-26
2015-05-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/69/9/10.1063/1.117397
10.1063/1.117397
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