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Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted deposition
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10.1063/1.118544
/content/aip/journal/apl/70/10/10.1063/1.118544
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/10/10.1063/1.118544
/content/aip/journal/apl/70/10/10.1063/1.118544
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/content/aip/journal/apl/70/10/10.1063/1.118544
1997-03-10
2014-08-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/10/10.1063/1.118544
10.1063/1.118544
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