No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Optical imaging of carrier dynamics in silicon with subwavelength resolution
1.J. R. Haynes and W. Shockley, Phys. Rev. 81, 835 (1951);
1.S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1969).
2.J. Waldmeyer, J. Appl. Phys. 63, 1977 (1988).
3.D. L. Polla, IEEE Electron. Device Lett. EDL-4, 185 (1983).
4.G. Bohnert, R. Hacker, and A. Hangleiter, J. Phys. (France) Colloq. 4, 617 (1988).
5.J. W. Goodman, Introduction to Fourier Optics (McGraw–Hill, New York, 1968).
6.D. W. Pohl, W. Denk, and M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
7.E. Betzig and J. K. Trautman, Science 257, 189 (1992).
8.E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, and R. L. Kostelak, Science 251, 1468 (1991).
9.A. H. La Rosa, C. L. Jahncke, and H. D. Hallen, Proc. SPIE 2384, 101 (1995).
10.A. La Rosa, C. L. Jahncke, and H. D. Hallen, Ultramicroscopy 57, 303 (1995).
11.E. Betzig, Principles and Applications of Near-Field Scanning Optical Microscopy (NSOM) (Kluwer, Acr-et-Senans, France, 1992), Vol. 1-7, p. 15.
12.B. I. Yakobson, P. J. Moyer, and M. A. Paesler, J. Appl. Phys. 73, 7984 (1993).
13.A. H. La Rosa, B. I. Yakobson, and H. D. Hallen, Appl. Phys. Lett. 67, 2597 (1995).
14.H. D. Hallen, B. I. Yakobson, A. La Rosa, and M. A. Paesler, Proc. SPIE 2535, 34 (1995).
15.The silicon samples used were phosphorus doped type Czochralski silicon wafers. The sample surfaces were cleaned with a HF solution prior to silicon dioxide growth. The sample shown in Figs. 2 and 3(a) had a thin, native oxide. The sample shown in Fig. 3 was covered with a 60-nm-thick oxide grown in a commercial furnace with an oxygen ambient.
16.For example, with τ=1 μs, and nm, τ is expected to be even shorter locally, although the average value can be longer.
17.F. Shimura, T. Okui, and T. Kusama, J. Appl. Phys. 67, 7168 (1990).
Article metrics loading...
Full text loading...
Most read this month
Most cited this month