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B diffusion and clustering in ion implanted Si: The role of B cluster precursors
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10.1063/1.118839
/content/aip/journal/apl/70/17/10.1063/1.118839
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/17/10.1063/1.118839
/content/aip/journal/apl/70/17/10.1063/1.118839
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/content/aip/journal/apl/70/17/10.1063/1.118839
1997-04-28
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: B diffusion and clustering in ion implanted Si: The role of B cluster precursors
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/17/10.1063/1.118839
10.1063/1.118839
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