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Oxidation of strained Si in a microwave electron cyclotron resonance plasma
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10.1063/1.118370
/content/aip/journal/apl/70/2/10.1063/1.118370
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/2/10.1063/1.118370
/content/aip/journal/apl/70/2/10.1063/1.118370
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/content/aip/journal/apl/70/2/10.1063/1.118370
1997-01-13
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxidation of strained Si in a microwave electron cyclotron resonance plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/2/10.1063/1.118370
10.1063/1.118370
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