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Overpressurized bubbles versus voids formed in helium implanted and annealed silicon
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10.1063/1.118251
/content/aip/journal/apl/70/6/10.1063/1.118251
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/6/10.1063/1.118251
/content/aip/journal/apl/70/6/10.1063/1.118251
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/content/aip/journal/apl/70/6/10.1063/1.118251
1997-02-10
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Overpressurized bubbles versus voids formed in helium implanted and annealed silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/6/10.1063/1.118251
10.1063/1.118251
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