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Atomic layer controlled growth of films using binary reaction sequence chemistry
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10.1063/1.118494
/content/aip/journal/apl/70/9/10.1063/1.118494
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/9/10.1063/1.118494
/content/aip/journal/apl/70/9/10.1063/1.118494
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/content/aip/journal/apl/70/9/10.1063/1.118494
1997-03-03
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic layer controlled growth of SiO2 films using binary reaction sequence chemistry
http://aip.metastore.ingenta.com/content/aip/journal/apl/70/9/10.1063/1.118494
10.1063/1.118494
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