Novel method for fabrication of integrated resistors on bilayer films using Ni implantation
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10.Ideally, with no contact resistance and perfect control of implant resistor geometry, a hypothetical implant resistor of length 0 μm would have a resistance of 0 Ω (see Fig. 3).
11.While we are calling the contact resistance, it is most likely a composite of other effects such as spreading resistance.
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