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How tunneling currents reduce plasma-induced charging
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10.Since fewer deflected ions reach the upper photoresist sidewalls as decreases, the entrance potential becomes more negative, thus preventing more plasma electrons from entering the trench.
11.Variation of the plasma conditions and rf bias in the typical regime for high-density plasmas does not change the location of the transition. The same is true for a slightly higher energy threshold to reaction, to account for the use of oxygen in the experiment.
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