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Evolution of defect-related structure in the x-ray absorption spectra of buried films
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10.1063/1.120292
/content/aip/journal/apl/71/22/10.1063/1.120292
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/22/10.1063/1.120292
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/content/aip/journal/apl/71/22/10.1063/1.120292
1997-12-01
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of defect-related structure in the x-ray absorption spectra of buried SiNx films
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/22/10.1063/1.120292
10.1063/1.120292
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