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Breakdown measurement of a capacitive radio frequency discharge with insulated electrode
1.Y. P. Raizer, Gas Discharge Physics (Springer, Berlin, 1991).
2.S. M. Levitskii, Zh. Tekh. Fiz. 27, 970 (1957).
3.M. Shoji and M. Sato, Proceedings of the 3rd International Conference on Reactive Plasma and 14th Symposium on Plasma Processing, Nara, 1997 (unpublished), p. 253.
4.M. Sato and M. Shoji, Jpn. J. Appl. Phys. 36, 5729 (1997).
5.V. A. Lisovsky and V. D. Yegorenkov, J. Phys. D 27, 2340 (1994).
6.B. E. Thompson and H. H. Sawin, J. Appl. Phys. 60, 89 (1986).
7.J. P. Boeuf, Phys. Rev. A 36, 2782 (1987).
8.W. Roznerski, J. Phys. D 29, 614 (1996).
9.A. B. Wedding, H. A. Blevin, and J. Fletcher, J. Phys. D 18, 2361 (1985).
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