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Free electron laser annealing of N-ion-implanted -SiC films
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10.1063/1.119668
/content/aip/journal/apl/71/6/10.1063/1.119668
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/6/10.1063/1.119668
/content/aip/journal/apl/71/6/10.1063/1.119668
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/content/aip/journal/apl/71/6/10.1063/1.119668
1997-08-11
2014-11-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Free electron laser annealing of N-ion-implanted 3C-SiC films
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/6/10.1063/1.119668
10.1063/1.119668
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