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A source of hyperthermal neutrals for materials processing
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10.1063/1.119706
/content/aip/journal/apl/71/7/10.1063/1.119706
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/7/10.1063/1.119706
/content/aip/journal/apl/71/7/10.1063/1.119706
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/content/aip/journal/apl/71/7/10.1063/1.119706
1997-08-18
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A source of hyperthermal neutrals for materials processing
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/7/10.1063/1.119706
10.1063/1.119706
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