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Selective thermal decomposition of ultrathin silicon oxide layers induced by electron-stimulated oxygen desorption
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10.1063/1.119720
/content/aip/journal/apl/71/8/10.1063/1.119720
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/8/10.1063/1.119720
/content/aip/journal/apl/71/8/10.1063/1.119720
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/content/aip/journal/apl/71/8/10.1063/1.119720
1997-08-25
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Selective thermal decomposition of ultrathin silicon oxide layers induced by electron-stimulated oxygen desorption
http://aip.metastore.ingenta.com/content/aip/journal/apl/71/8/10.1063/1.119720
10.1063/1.119720
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