1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Nitrogen plasma annealing for low temperature films
Rent:
Rent this article for
USD
10.1063/1.120569
/content/aip/journal/apl/72/11/10.1063/1.120569
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/11/10.1063/1.120569
/content/aip/journal/apl/72/11/10.1063/1.120569
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/72/11/10.1063/1.120569
1998-03-16
2014-09-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen plasma annealing for low temperature Ta2O5 films
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/11/10.1063/1.120569
10.1063/1.120569
SEARCH_EXPAND_ITEM