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Electromigration-induced stress in aluminum conductor lines measured by x-ray microdiffraction
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10.1063/1.120604
/content/aip/journal/apl/72/11/10.1063/1.120604
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/11/10.1063/1.120604
/content/aip/journal/apl/72/11/10.1063/1.120604
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/content/aip/journal/apl/72/11/10.1063/1.120604
1998-03-16
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electromigration-induced stress in aluminum conductor lines measured by x-ray microdiffraction
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/11/10.1063/1.120604
10.1063/1.120604
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