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Thermal characteristics of silicon nitride membranes at sub-Kelvin temperatures
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9.Nitridized silicon wafers were fabricated at UC Berkeley.
10.The heating power was calculated simply by since the voltage is well above the superconducting gap, and no NIS cooling takes place in this regime.
11.W. Holmes (unpublished). This is from a measurement on an 0.85 μm thick membrane. This author, however, stresses the radiative nature of heat propagation in a membrane.
12.F. Pobell, Matter and Methods at Low Temperatures, 2nd ed. (Springer, Berlin, 1996).
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