Deactivation in heavily arsenic-doped silicon
1.D. Nobili, S. Solmi, A. Parisini, M. Derdour, A. Armigliato, and L. Moro, Phys. Rev. B 49, 2477 (1994), and references therein.
2.A. Lietoila, J. F. Gibbons, and T. W. Sigmon, Appl. Phys. Lett. 36, 765 (1980).
3.J. Goetzlich, Mater. Res. Soc. Symp. Proc. 45, 349 (1985).
4.S. Luning, P. M. Rousseau, P. B. Griffin, P. G. Carey, and J. D. Plummer, Technical Digest of the International Electron Devices Meeting, 1992, p. 457.
5.H. Bauer, P. Pichler, and H. Ryssel, IEEE Trans. Semicond. Manuf. 8, 414 (1995);
5.R. Subrahmanyan, M. Orlowski, and G. Huffman, J. Appl. Phys. 71, 164 (1992);
5.A. Parisini, A. Bourret, A. Armigliato, M. Servidori, S. Solmi, R. Fabbri, J. R. Regnard, and J. L. Alain, J. Appl. Phys. 67, 2320 (1990).
6.K. C. Pandey, A. Erbil, G. S. Cargill, R. F. Boehme, and D. Vanderbilt, Phys. Rev. Lett. 61, 1282 (1988).
7.M. Ramamoorthy and S. T. Pantelides, Phys. Rev. Lett. 76, 4753 (1996).
8.A. Sher, M. van Schilfgaarde, A.-B. Chen, and W. Chen, Phys. Rev. B 36, 4279 (1987).
9.M. A. Berding and A. Sher (unpublished).
10.Heavily doped regions are often produced by ion implantation and a laser-melt anneal after which the arsenic is nearly fully activated. SIMS measurements indicate that the arsenic stays in the lattice during subsequent processing (which we are attempting to model) in which the deactivation takes place.
11.O. K. Andersen, O. Jepsen, and D. Glotzel, Highlights of Condensed Matter Theory, edited by F. Bassani et al. (North-Holland, Amsterdam, The Netherlands, 1985), p. 59;
11.M. Methfessel and M. van Schilfgaarde (unpublished).
12.U. von Barth and L. Hedin, J. Phys. C 5, 1629 (1972).
13.Landolt-Bor̈nstein, Vol. 17a, edited by O. Madelung (Springer, New York, 1982).
14.P. Rousseau, Ph.D. dissertation, Stanford University, 1996.
15.M. Derdour, D. Nobili, and S. Solmi, J. Electrochem. Soc. 138, 857 (1991);
15.M. Derdour, G. Furlan, and D. Nobili, Sol. Energy Mater. Sol. Cells 32, 435 (1994).
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Article metrics loading...
Full text loading...
Most read this month
Most cited this month