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Stress development during deposition of thin films
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10.1063/1.121410
/content/aip/journal/apl/72/20/10.1063/1.121410
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/20/10.1063/1.121410
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/content/aip/journal/apl/72/20/10.1063/1.121410
1998-05-18
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress development during deposition of CNx thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/20/10.1063/1.121410
10.1063/1.121410
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