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Two-dimensional network of dislocations and nanocavities in hydrogen-implanted and two-step annealed silicon
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10.1063/1.121413
/content/aip/journal/apl/72/20/10.1063/1.121413
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/20/10.1063/1.121413
/content/aip/journal/apl/72/20/10.1063/1.121413
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/content/aip/journal/apl/72/20/10.1063/1.121413
1998-05-18
2015-07-04
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Two-dimensional network of dislocations and nanocavities in hydrogen-implanted and two-step annealed silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/20/10.1063/1.121413
10.1063/1.121413
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