Full text loading...
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Microstructural difference between platinum and silver trapped in hydrogen induced cavities in silicon
1.M. I. Current, I. Yamada, N. W. Cheung, P. L. F. Hemment, and K. J. Reeson, in Handbook of Ion Implantation Technology, edited by J. F. Ziegler (North-Holland, Amsterdam, 1992), p. 363.
2.K. Graff, Metal Impurities in Silicon-Device Fabrication (Springer, Berlin, 1995).
3.J. Wong-Leung, C. E. Ascheron, M. Petravic, R. G. Elliman, and J. S. Williams, Appl. Phys. Lett. 66, 1231 (1995).
4.J. Wong-Leung, E. Nygren, and J. S. Williams, Appl. Phys. Lett. 67, 416 (1995).
5.B. Mohadjeri, J. S. Williams, and J. Wong-Leung, Appl. Phys. Lett. 66, 1889 (1995).
6.S. M. Myers, D. M. Follstaedt, and D. M. Bishop, Mater. Sci. Forum 143–147, 1635 (1994).
7.S. M. Myers and D. M. Follstaedt, J. Appl. Phys. 79, 1337 (1996).
8.S. M. Myers, G. A. Petersen, and C. H. Seager, J. Appl. Phys. 80, 3717 (1996).
9.A. Kinomura, J. S. Williams, J. Wong-Leung, and M. Petravic, Nucl. Instrum. Methods Phys. Res. B 127/128, 297 (1997).
10.Under our conditions of cavity formation, the internal surface area of cavities was measured (from XTEM) to be about one tenth of the free surface or approximately Si atoms covering these internal surfaces.
11.J. M. Poate, D. C. Jacobson, J. S. Williams, R. G. Elliman, and D. O. Boerma, Nucl. Instrum. Methods Phys. Res. B 19/20, 480 (1987).
12.H. Okamoto and L. E. Tanner, in Binary Alloy Phase Diagrams, edited by T. B. Massalski, H. Okamoto, P. R. Subramanian, and L. Kacprzak (ASM International, Materials Park, 1990), p. 3128.
13.B. Y. Tsaur, Z. L. Liau, and J. W. Mayer, Phys. Lett. A71, 270 (1979).
14.R. W. Olesinski and G. J. Abbaschian, in Binary Alloy Phase Diagrams, edited by T. B. Massalski, H. Okamoto, P. R. Subramanian, and L. Kacprzak (ASM International, Materials Park, 1990), p. 92.
Article metrics loading...