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Linewidth and underlayer influence on texture in submicrometer-wide Al and AlCu lines
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10.1063/1.120726
/content/aip/journal/apl/72/3/10.1063/1.120726
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/3/10.1063/1.120726
/content/aip/journal/apl/72/3/10.1063/1.120726
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/content/aip/journal/apl/72/3/10.1063/1.120726
1998-01-19
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Linewidth and underlayer influence on texture in submicrometer-wide Al and AlCu lines
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/3/10.1063/1.120726
10.1063/1.120726
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