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Factors affecting resolution in scanning electron beam induced patterning of surface adsorption layers
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10.1063/1.120730
/content/aip/journal/apl/72/3/10.1063/1.120730
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/3/10.1063/1.120730
/content/aip/journal/apl/72/3/10.1063/1.120730
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/content/aip/journal/apl/72/3/10.1063/1.120730
1998-01-19
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Factors affecting resolution in scanning electron beam induced patterning of surface adsorption layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/3/10.1063/1.120730
10.1063/1.120730
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