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Excess silicon at the interface
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10.1063/1.120786
/content/aip/journal/apl/72/4/10.1063/1.120786
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/4/10.1063/1.120786
/content/aip/journal/apl/72/4/10.1063/1.120786
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/content/aip/journal/apl/72/4/10.1063/1.120786
1998-01-26
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Excess silicon at the Si3N4/SiO2 interface
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/4/10.1063/1.120786
10.1063/1.120786
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