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Scanning capacitance spectroscopy: An analytical technique for -junction delineation in Si devices
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10.1063/1.120849
/content/aip/journal/apl/72/6/10.1063/1.120849
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/6/10.1063/1.120849
/content/aip/journal/apl/72/6/10.1063/1.120849
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/content/aip/journal/apl/72/6/10.1063/1.120849
1998-02-09
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scanning capacitance spectroscopy: An analytical technique for pn-junction delineation in Si devices
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/6/10.1063/1.120849
10.1063/1.120849
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