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Composition dependence of room temperature 1.54 m Er luminescence from erbium-doped silicon:oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
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10.1063/1.120974
/content/aip/journal/apl/72/9/10.1063/1.120974
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/9/10.1063/1.120974
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/content/aip/journal/apl/72/9/10.1063/1.120974
1998-03-02
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Composition dependence of room temperature 1.54 μm Er3+ luminescence from erbium-doped silicon:oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/72/9/10.1063/1.120974
10.1063/1.120974
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