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Deposition of highly crosslinked fluorinated amorphous carbon film and structural evolution during thermal annealing
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10.1063/1.122190
/content/aip/journal/apl/73/11/10.1063/1.122190
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/11/10.1063/1.122190
/content/aip/journal/apl/73/11/10.1063/1.122190
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/content/aip/journal/apl/73/11/10.1063/1.122190
1998-09-14
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of highly crosslinked fluorinated amorphous carbon film and structural evolution during thermal annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/11/10.1063/1.122190
10.1063/1.122190
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