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Microwave plasma nitridation of silicon dioxide on strained Si
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10.1063/1.122204
/content/aip/journal/apl/73/11/10.1063/1.122204
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/11/10.1063/1.122204
/content/aip/journal/apl/73/11/10.1063/1.122204
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/content/aip/journal/apl/73/11/10.1063/1.122204
1998-09-14
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microwave plasma nitridation of silicon dioxide on strained Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/11/10.1063/1.122204
10.1063/1.122204
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