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Atomic transport across the interfaces during the formation of ultrathin silicon oxide/nitride/oxide films
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10.1063/1.122338
/content/aip/journal/apl/73/14/10.1063/1.122338
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/14/10.1063/1.122338
/content/aip/journal/apl/73/14/10.1063/1.122338
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/content/aip/journal/apl/73/14/10.1063/1.122338
1998-10-05
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic transport across the interfaces during the formation of ultrathin silicon oxide/nitride/oxide films
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/14/10.1063/1.122338
10.1063/1.122338
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