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Neutron reflectometry, x-ray reflectometry, and spectroscopic ellipsometry characterization of thin on Si
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10.1063/1.122442
/content/aip/journal/apl/73/15/10.1063/1.122442
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/15/10.1063/1.122442
/content/aip/journal/apl/73/15/10.1063/1.122442
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/content/aip/journal/apl/73/15/10.1063/1.122442
1998-10-12
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Neutron reflectometry, x-ray reflectometry, and spectroscopic ellipsometry characterization of thin SiO2 on Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/15/10.1063/1.122442
10.1063/1.122442
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