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On the correlation between the carbon content and the electrical quality of thermally grown oxides on p-type 6H–Silicon carbide
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10.1063/1.122562
/content/aip/journal/apl/73/15/10.1063/1.122562
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/15/10.1063/1.122562
/content/aip/journal/apl/73/15/10.1063/1.122562
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/content/aip/journal/apl/73/15/10.1063/1.122562
1998-10-12
2014-12-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: On the correlation between the carbon content and the electrical quality of thermally grown oxides on p-type 6H–Silicon carbide
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/15/10.1063/1.122562
10.1063/1.122562
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