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Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using /noble gas mixtures
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10.1063/1.121898
/content/aip/journal/apl/73/4/10.1063/1.121898
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/4/10.1063/1.121898
/content/aip/journal/apl/73/4/10.1063/1.121898
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/content/aip/journal/apl/73/4/10.1063/1.121898
1998-07-27
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using N2/noble gas mixtures
http://aip.metastore.ingenta.com/content/aip/journal/apl/73/4/10.1063/1.121898
10.1063/1.121898
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