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Electrical properties of hafnium silicate gate dielectrics deposited directly on silicon
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10.1063/1.124036
/content/aip/journal/apl/74/19/10.1063/1.124036
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/19/10.1063/1.124036
/content/aip/journal/apl/74/19/10.1063/1.124036
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/content/aip/journal/apl/74/19/10.1063/1.124036
1999-05-10
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical properties of hafnium silicate gate dielectrics deposited directly on silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/19/10.1063/1.124036
10.1063/1.124036
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