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Electronic structure of nickel silicide in subhalf-micron lines and blanket films: An x-ray absorption fine structures study at the Ni and edge
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10.1063/1.124049
/content/aip/journal/apl/74/19/10.1063/1.124049
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/19/10.1063/1.124049
/content/aip/journal/apl/74/19/10.1063/1.124049
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/content/aip/journal/apl/74/19/10.1063/1.124049
1999-05-10
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electronic structure of nickel silicide in subhalf-micron lines and blanket films: An x-ray absorption fine structures study at the Ni and Si L3,2 edge
http://aip.metastore.ingenta.com/content/aip/journal/apl/74/19/10.1063/1.124049
10.1063/1.124049
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